Optomechanical structures based on SiN

The goal of this project was to fabricate SiN beams and couple the mechanical vibrations of the beam to a microcavity, and study their effects. The main challenge in fabrication is that SiN membranes are fragile, making it difficult to fabricate. I experimented with different fabrication techniques like mask-less lithography, Inductively Coupled Plasma(ICP), and Focussed Ion Beam(FIB) method and tried several variations. After several attempts, I fabricated a good-quality SiN beam. After fabricating, I made simulations using Comsol MultiPhysics to design and study the structure to obtain the desired frequency.